Gradual modulation of semiconductor properties via grayscale processing

Sara Kacmoli; Carlo Holly; Claire F. Gmachl

doi:10.1364/CLEO_AT.2020.AF2I.2

Gradual modulation of semiconductor properties via grayscale processing

Sara Kacmoli, Carlo Holly, Claire F. Gmachl

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

We demonstrate a novel method of inducing a gradual change in semiconductor conductivity by combining grayscale processing of photoresist and proton implantation. This method is flexible and lends itself to many applications in semiconductor-based optical and electrical devices.

Original language	English (US)
Title of host publication	CLEO
Subtitle of host publication	Applications and Technology, CLEO_AT 2020
Publisher	OSA - The Optical Society
ISBN (Electronic)	9781557528209
DOIs	https://doi.org/10.1364/CLEO_AT.2020.AF2I.2
State	Published - 2020
Event	CLEO: Applications and Technology, CLEO_AT 2020 - Washington, United States Duration: May 10 2020 → May 15 2020

Publication series

Name	Optics InfoBase Conference Papers
Volume	Part F181-CLEO-AT 2020

Conference

Conference	CLEO: Applications and Technology, CLEO_AT 2020
Country/Territory	United States
City	Washington
Period	5/10/20 → 5/15/20

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Mechanics of Materials

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10.1364/CLEO_AT.2020.AF2I.2

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@inproceedings{9d475119286d4e44af4b009346529e62,

title = "Gradual modulation of semiconductor properties via grayscale processing",

abstract = "We demonstrate a novel method of inducing a gradual change in semiconductor conductivity by combining grayscale processing of photoresist and proton implantation. This method is flexible and lends itself to many applications in semiconductor-based optical and electrical devices.",

author = "Sara Kacmoli and Carlo Holly and Gmachl, {Claire F.}",

note = "Publisher Copyright: CLEO 2020 {\textcopyright} OSA 2020 {\textcopyright} 2020 The Author(s). Copyright: Copyright 2020 Elsevier B.V., All rights reserved.; CLEO: Applications and Technology, CLEO_AT 2020 ; Conference date: 10-05-2020 Through 15-05-2020",

year = "2020",

doi = "10.1364/CLEO_AT.2020.AF2I.2",

language = "English (US)",

series = "Optics InfoBase Conference Papers",

publisher = "OSA - The Optical Society",

booktitle = "CLEO",

}

Kacmoli, S, Holly, C & Gmachl, CF 2020, Gradual modulation of semiconductor properties via grayscale processing. in CLEO: Applications and Technology, CLEO_AT 2020., AF2I.2, Optics InfoBase Conference Papers, vol. Part F181-CLEO-AT 2020, OSA - The Optical Society, CLEO: Applications and Technology, CLEO_AT 2020, Washington, United States, 5/10/20. https://doi.org/10.1364/CLEO_AT.2020.AF2I.2

TY - GEN

T1 - Gradual modulation of semiconductor properties via grayscale processing

AU - Kacmoli, Sara

AU - Holly, Carlo

AU - Gmachl, Claire F.

PY - 2020

Y1 - 2020

N2 - We demonstrate a novel method of inducing a gradual change in semiconductor conductivity by combining grayscale processing of photoresist and proton implantation. This method is flexible and lends itself to many applications in semiconductor-based optical and electrical devices.

AB - We demonstrate a novel method of inducing a gradual change in semiconductor conductivity by combining grayscale processing of photoresist and proton implantation. This method is flexible and lends itself to many applications in semiconductor-based optical and electrical devices.

UR - http://www.scopus.com/inward/record.url?scp=85095116193&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85095116193&partnerID=8YFLogxK

U2 - 10.1364/CLEO_AT.2020.AF2I.2

DO - 10.1364/CLEO_AT.2020.AF2I.2

M3 - Conference contribution

AN - SCOPUS:85095116193

T3 - Optics InfoBase Conference Papers

BT - CLEO

PB - OSA - The Optical Society

T2 - CLEO: Applications and Technology, CLEO_AT 2020

Y2 - 10 May 2020 through 15 May 2020

ER -

Gradual modulation of semiconductor properties via grayscale processing

Abstract

Publication series

Conference

All Science Journal Classification (ASJC) codes

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