Gradual modulation of semiconductor properties via grayscale processing

Sara Kacmoli, Carlo Holly, Claire F. Gmachl

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We demonstrate a novel method of inducing a gradual change in semiconductor conductivity by combining grayscale processing of photoresist and proton implantation. This method is flexible and lends itself to many applications in semiconductor-based optical and electrical devices.

Original languageEnglish (US)
Title of host publicationCLEO
Subtitle of host publicationApplications and Technology, CLEO_AT 2020
PublisherOSA - The Optical Society
ISBN (Electronic)9781557528209
DOIs
StatePublished - 2020
EventCLEO: Applications and Technology, CLEO_AT 2020 - Washington, United States
Duration: May 10 2020May 15 2020

Publication series

NameOptics InfoBase Conference Papers
VolumePart F181-CLEO-AT 2020

Conference

ConferenceCLEO: Applications and Technology, CLEO_AT 2020
CountryUnited States
CityWashington
Period5/10/205/15/20

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials

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