@inproceedings{d65b0c95b5844703a06676ff7b712b6e,
title = "Generation of energetic electrons by surface waves in VHF CCPs",
author = "D. Eremin and E. Kemaneci and M. Matsukuma and I. Kaganovich and T. Mussenbrock and Brinkmann, \{R. P.\}",
year = "2023",
language = "English (US)",
series = "49th EPS Conference on Plasma Physics, EPS 2023",
publisher = "European Physical Society (EPS)",
booktitle = "49th EPS Conference on Plasma Physics, EPS 2023",
note = "49th EPS Conference on Plasma Physics, EPS 2023 ; Conference date: 03-07-2023 Through 07-07-2023",
}