Generating Nanostructures with Multiphoton Absorption Polymerization using Optical Trap Assisted Nanopatterning

Yu Cheng Tsai; Karl Heinz Leitz; Romain Fardel; Michael Schmidt; Craig B. Arnold

doi:10.1016/j.phpro.2012.10.087

Generating Nanostructures with Multiphoton Absorption Polymerization using Optical Trap Assisted Nanopatterning

Yu Cheng Tsai
, Karl Heinz Leitz
, Romain Fardel
, Michael Schmidt
, Craig B. Arnold

Research output: Contribution to journal › Conference article › peer-review

3 Scopus citations

Abstract

The need to generate sub 100 nm features is of interest for a variety of applications including optics, optoelectronics, and plasmonics. To address this requirement, several advanced optical lithography techniques have been developed based on either multiphoton absorption polymerization or near-field effects. In this paper, we combine strengths from multiphoton absorption and near field using optical trap assisted nanopatterning (OTAN). A Gaussian beam is used to position a microsphere in a polymer precursor fluid near a substrate. An ultrafast laser is focused by that microsphere to induce multiphoton polymerization in the near field, leading additive direct-write nanoscale processing.

Original language	English (US)
Pages (from-to)	669-673
Number of pages	5
Journal	Physics Procedia
Volume	39
DOIs	https://doi.org/10.1016/j.phpro.2012.10.087
State	Published - 2012
Event	7th International Conference on Laser Assisted Net Shape Engineering. LANE 2012 - Furth, Germany Duration: Nov 12 2012 → Nov 15 2012

All Science Journal Classification (ASJC) codes

General Physics and Astronomy

Keywords

Multiphoton absoprtion
Near-field
Optical trapping
Polymerization

Access to Document

10.1016/j.phpro.2012.10.087

Cite this

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title = "Generating Nanostructures with Multiphoton Absorption Polymerization using Optical Trap Assisted Nanopatterning",

abstract = "The need to generate sub 100 nm features is of interest for a variety of applications including optics, optoelectronics, and plasmonics. To address this requirement, several advanced optical lithography techniques have been developed based on either multiphoton absorption polymerization or near-field effects. In this paper, we combine strengths from multiphoton absorption and near field using optical trap assisted nanopatterning (OTAN). A Gaussian beam is used to position a microsphere in a polymer precursor fluid near a substrate. An ultrafast laser is focused by that microsphere to induce multiphoton polymerization in the near field, leading additive direct-write nanoscale processing.",

keywords = "Multiphoton absoprtion, Near-field, Optical trapping, Polymerization",

author = "Tsai, \{Yu Cheng\} and Leitz, \{Karl Heinz\} and Romain Fardel and Michael Schmidt and Arnold, \{Craig B.\}",

note = "Publisher Copyright: {\textcopyright} 2011 Published by Elsevier Ltd.; 7th International Conference on Laser Assisted Net Shape Engineering. LANE 2012 ; Conference date: 12-11-2012 Through 15-11-2012",

year = "2012",

doi = "10.1016/j.phpro.2012.10.087",

language = "English (US)",

volume = "39",

pages = "669--673",

journal = "Physics Procedia",

issn = "1875-3884",

publisher = "Elsevier B.V.",

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T1 - Generating Nanostructures with Multiphoton Absorption Polymerization using Optical Trap Assisted Nanopatterning

AU - Tsai, Yu Cheng

AU - Leitz, Karl Heinz

AU - Fardel, Romain

AU - Schmidt, Michael

AU - Arnold, Craig B.

PY - 2012

Y1 - 2012

N2 - The need to generate sub 100 nm features is of interest for a variety of applications including optics, optoelectronics, and plasmonics. To address this requirement, several advanced optical lithography techniques have been developed based on either multiphoton absorption polymerization or near-field effects. In this paper, we combine strengths from multiphoton absorption and near field using optical trap assisted nanopatterning (OTAN). A Gaussian beam is used to position a microsphere in a polymer precursor fluid near a substrate. An ultrafast laser is focused by that microsphere to induce multiphoton polymerization in the near field, leading additive direct-write nanoscale processing.

AB - The need to generate sub 100 nm features is of interest for a variety of applications including optics, optoelectronics, and plasmonics. To address this requirement, several advanced optical lithography techniques have been developed based on either multiphoton absorption polymerization or near-field effects. In this paper, we combine strengths from multiphoton absorption and near field using optical trap assisted nanopatterning (OTAN). A Gaussian beam is used to position a microsphere in a polymer precursor fluid near a substrate. An ultrafast laser is focused by that microsphere to induce multiphoton polymerization in the near field, leading additive direct-write nanoscale processing.

KW - Multiphoton absoprtion

KW - Near-field

KW - Optical trapping

KW - Polymerization

UR - https://www.scopus.com/pages/publications/85014455083

UR - https://www.scopus.com/pages/publications/85014455083#tab=citedBy

U2 - 10.1016/j.phpro.2012.10.087

DO - 10.1016/j.phpro.2012.10.087

M3 - Conference article

AN - SCOPUS:85014455083

SN - 1875-3884

VL - 39

SP - 669

EP - 673

JO - Physics Procedia

JF - Physics Procedia

T2 - 7th International Conference on Laser Assisted Net Shape Engineering. LANE 2012

Y2 - 12 November 2012 through 15 November 2012

ER -

Generating Nanostructures with Multiphoton Absorption Polymerization using Optical Trap Assisted Nanopatterning

Abstract

All Science Journal Classification (ASJC) codes

Keywords

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