Generating Nanostructures with Multiphoton Absorption Polymerization using Optical Trap Assisted Nanopatterning

Yu Cheng Tsai, Karl Heinz Leitz, Romain Fardel, Michael Schmidt, Craig B. Arnold

Research output: Contribution to journalConference article

3 Scopus citations

Abstract

The need to generate sub 100 nm features is of interest for a variety of applications including optics, optoelectronics, and plasmonics. To address this requirement, several advanced optical lithography techniques have been developed based on either multiphoton absorption polymerization or near-field effects. In this paper, we combine strengths from multiphoton absorption and near field using optical trap assisted nanopatterning (OTAN). A Gaussian beam is used to position a microsphere in a polymer precursor fluid near a substrate. An ultrafast laser is focused by that microsphere to induce multiphoton polymerization in the near field, leading additive direct-write nanoscale processing.

Original languageEnglish (US)
Pages (from-to)669-673
Number of pages5
JournalPhysics Procedia
Volume39
DOIs
StatePublished - Jan 1 2012
Event7th International Conference on Laser Assisted Net Shape Engineering. LANE 2012 - Furth, Germany
Duration: Nov 12 2012Nov 15 2012

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)

Keywords

  • Multiphoton absoprtion
  • Near-field
  • Optical trapping
  • Polymerization

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