Gallium phosphide as a new material for anodically bonded atomic sensors

Nezih Dural, Michael V. Romalis

Research output: Contribution to journalArticlepeer-review

14 Scopus citations


Miniaturized atomic sensors are often fabricated using anodic bonding of silicon and borosilicate glass. Here we describe a technique for fabricating anodically bonded alkali-metal cells using GaP and Pyrex. GaP is a non-birefringent semiconductor that is transparent at alkali-metal resonance wavelengths, allowing new sensor geometries. GaP also has a higher thermal conductivity and lower He permeability than borosilicate glass and can be anodically bonded below 200 °C, which can also be advantageous in other vacuum sealing applications.

Original languageEnglish (US)
Article number086101
JournalAPL Materials
Issue number8
StatePublished - Aug 2014

All Science Journal Classification (ASJC) codes

  • General Materials Science
  • General Engineering


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