Abstract
The positron annihilation method was used to investigate the type and concentration of compensating centers in homogeneously or δ-doped GaAs(Si) layers grown by molecular beam epitaxy (MBE). The results show the presence of Ga vacancies and negative ions in both type of layers. The negative ion is attributed to the SiAs in homogeneously doped GaAs(Si) and to the GaAs in δ-doped GaAs(Si). The concentrations of Ga vacancies and negative ions increase strongly when the Si concentration exceeds 5 × 1018 cm-3 in homogeneously doped GaAs(Si) and 1 × 1013 cm-2 in δ-doped GaAs(Si). Furthermore, the results in the superlattice indicate that the defects observed by the positron are located in undoped material between the delta planes.
Original language | English (US) |
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Pages (from-to) | 879-884 |
Number of pages | 6 |
Journal | Materials Science Forum |
Volume | 258-263 |
Issue number | PART 2 |
State | Published - 1997 |
Externally published | Yes |
All Science Journal Classification (ASJC) codes
- General Materials Science
- Condensed Matter Physics
- Mechanics of Materials
- Mechanical Engineering
Keywords
- Compensation
- Positron spectroscopy
- Superlattice