Fundamentals of the Focused Ion Beam System

Nan Yao

doi:10.1002/9783527641864.ch18

Fundamentals of the Focused Ion Beam System

Nan Yao

Princeton Materials Institute

Research output: Chapter in Book/Report/Conference proceeding › Chapter

3 Scopus citations

Original language	English (US)
Title of host publication	Handbook of Nanoscopy
Publisher	Wiley-VCH
Pages	645-671
Number of pages	27
Volume	1
ISBN (Print)	9783527317066
DOIs	https://doi.org/10.1002/9783527641864.ch18
State	Published - May 23 2012

All Science Journal Classification (ASJC) codes

General Engineering

Keywords

Deposition
Dwell time
Electronic collisions
Etching
Focused ion beam
Milling
Nuclear collisions

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10.1002/9783527641864.ch18

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title = "Fundamentals of the Focused Ion Beam System",

keywords = "Deposition, Dwell time, Electronic collisions, Etching, Focused ion beam, Milling, Nuclear collisions",

author = "Nan Yao",

year = "2012",

month = may,

day = "23",

doi = "10.1002/9783527641864.ch18",

language = "English (US)",

isbn = "9783527317066",

volume = "1",

pages = "645--671",

booktitle = "Handbook of Nanoscopy",

publisher = "Wiley-VCH",

}

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T1 - Fundamentals of the Focused Ion Beam System

AU - Yao, Nan

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KW - Deposition

KW - Dwell time

KW - Electronic collisions

KW - Etching

KW - Focused ion beam

KW - Milling

KW - Nuclear collisions

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SP - 645

EP - 671

BT - Handbook of Nanoscopy

PB - Wiley-VCH

ER -

Fundamentals of the Focused Ion Beam System

All Science Journal Classification (ASJC) codes

Keywords

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