Original language | English (US) |
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Title of host publication | Handbook of Nanoscopy |
Publisher | Wiley-VCH |
Pages | 645-671 |
Number of pages | 27 |
Volume | 1 |
ISBN (Print) | 9783527317066 |
DOIs | |
State | Published - May 23 2012 |
All Science Journal Classification (ASJC) codes
- General Engineering
Keywords
- Deposition
- Dwell time
- Electronic collisions
- Etching
- Focused ion beam
- Milling
- Nuclear collisions