Fundamentals of the Focused Ion Beam System

Research output: Chapter in Book/Report/Conference proceedingChapter

2 Scopus citations
Original languageEnglish (US)
Title of host publicationHandbook of Nanoscopy
PublisherWiley-VCH
Pages645-671
Number of pages27
Volume1
ISBN (Print)9783527317066
DOIs
StatePublished - May 23 2012

All Science Journal Classification (ASJC) codes

  • Engineering(all)

Keywords

  • Deposition
  • Dwell time
  • Electronic collisions
  • Etching
  • Focused ion beam
  • Milling
  • Nuclear collisions

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