Fundamental beam studies of deuterium and fluorine radical reaction kinetics on surfaces

Frank Greer; D. Fraser; J. W. Cobum; David B. Graves

doi:10.1116/1.1585065

Fundamental beam studies of deuterium and fluorine radical reaction kinetics on surfaces

Frank Greer
, D. Fraser
, J. W. Cobum
, David B. Graves

Research output: Contribution to journal › Article › peer-review

Original language	English (US)
Pages (from-to)	1391-1402
Number of pages	12
Journal	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume	21
Issue number	4
DOIs	https://doi.org/10.1116/1.1585065
State	Published - 2003
Externally published	Yes

All Science Journal Classification (ASJC) codes

Condensed Matter Physics
Electrical and Electronic Engineering

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@article{aca5ae03b0524a2b8e58a917c3211326,

title = "Fundamental beam studies of deuterium and fluorine radical reaction kinetics on surfaces",

author = "Frank Greer and D. Fraser and Cobum, \{J. W.\} and Graves, \{David B.\}",

year = "2003",

doi = "10.1116/1.1585065",

language = "English (US)",

volume = "21",

pages = "1391--1402",

journal = "Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures",

issn = "1071-1023",

publisher = "AVS Science and Technology Society",

number = "4",

}

TY - JOUR

T1 - Fundamental beam studies of deuterium and fluorine radical reaction kinetics on surfaces

AU - Greer, Frank

AU - Fraser, D.

AU - Cobum, J. W.

AU - Graves, David B.

PY - 2003

Y1 - 2003

UR - https://www.scopus.com/pages/publications/0141681280

UR - https://www.scopus.com/pages/publications/0141681280#tab=citedBy

U2 - 10.1116/1.1585065

DO - 10.1116/1.1585065

M3 - Article

AN - SCOPUS:0141681280

SN - 1071-1023

VL - 21

SP - 1391

EP - 1402

JO - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

JF - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

IS - 4

ER -

Fundamental beam studies of deuterium and fluorine radical reaction kinetics on surfaces

All Science Journal Classification (ASJC) codes

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