Fundamental beam studies of deuterium and fluorine radical reaction kinetics on surfaces

Frank Greer, D. Fraser, J. W. Cobum, David B. Graves

Research output: Contribution to journalArticlepeer-review

3 Scopus citations
Original languageEnglish (US)
Pages (from-to)1391-1402
Number of pages12
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume21
Issue number4
DOIs
StatePublished - 2003
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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