Fundamental beam studies of deuterium and fluorine radical reaction kinetics on surfaces

Frank Greer; D. Fraser; J. W. Cobum; David B. Graves

doi:10.1116/1.1585065

Fundamental beam studies of deuterium and fluorine radical reaction kinetics on surfaces

Frank Greer, D. Fraser, J. W. Cobum, David B. Graves

Research output: Contribution to journal › Article › peer-review

Original language	English (US)
Pages (from-to)	1391-1402
Number of pages	12
Journal	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume	21
Issue number	4
DOIs	https://doi.org/10.1116/1.1585065
State	Published - 2003
Externally published	Yes

All Science Journal Classification (ASJC) codes

Condensed Matter Physics
Electrical and Electronic Engineering

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10.1116/1.1585065

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JF - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

IS - 4

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Fundamental beam studies of deuterium and fluorine radical reaction kinetics on surfaces

All Science Journal Classification (ASJC) codes

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