@article{aca5ae03b0524a2b8e58a917c3211326,
title = "Fundamental beam studies of deuterium and fluorine radical reaction kinetics on surfaces",
author = "Frank Greer and D. Fraser and Cobum, {J. W.} and Graves, {David B.}",
year = "2003",
doi = "10.1116/1.1585065",
language = "English (US)",
volume = "21",
pages = "1391--1402",
journal = "Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures",
issn = "1071-1023",
publisher = "American Institute of Physics",
number = "4",
}