Free-standing mechanical and photonic nanostructures in single-crystal diamond

Keyphrases

• Fabrication Methods 100%
• Single Crystal Diamond 100%
• Photonic Nanostructures 100%
• Electrical Isolation 50%
• Material Properties 50%
• Optical Waveguides 50%
• Electronic Devices 50%
• Actuator 50%
• Nanomechanics 50%
• Nanoscale Devices 50%
• 3D Assembly 50%
• Photonic Devices 50%
• Mechanical Device 50%
• Photonic Crystal Cavity 50%
• Device Layer 50%
• Thin Film Deposition 50%
• Anisotropic Plasma 50%
• Oblique Angle 50%
• Thin Film Fabrication 50%
• Nanobeam 50%
• Bulk Single Crystal 50%
• Microdisk Cavities 50%
• Plasma Etching 50%
• Nanoscale Component 50%
• Optical Isolation 50%
• Mechanical Resonator 50%
• Quantum Photonics 50%
• Optoelectronic Devices 50%

Material Science

• Diamond 100%
• Single Crystal 100%
• Nanostructure 100%
• Waveguide 50%
• Actuator 50%
• Thin Films 50%
• Optical Resonator 50%
• Materials Property 50%
• Optical Device 50%
• Thin Film Deposition 50%
• Plasma Etching 50%
• Photonic Crystal 50%
• Nanoscale Device 50%