Free-standing mechanical and photonic nanostructures in single-crystal diamond

Michael J. Burek, Nathalie P. De Leon, Brendan J. Shields, Birgit J.M. Hausmann, Yiwen Chu, Qimin Quan, Alexander S. Zibrov, Hongkun Park, Mikhail D. Lukin, Marko Lončar

Research output: Contribution to journalArticlepeer-review

216 Scopus citations


A variety of nanoscale photonic, mechanical, electronic, and optoelectronic devices require scalable thin film fabrication. Typically, the device layer is defined by thin film deposition on a substrate of a different material, and optical or electrical isolation is provided by the material properties of the substrate or by removal of the substrate. For a number of materials this planar approach is not feasible, and new fabrication techniques are required to realize complex nanoscale devices. Here, we report a three-dimensional fabrication technique based on anisotropic plasma etching at an oblique angle to the sample surface. As a proof of concept, this angled-etching methodology is used to fabricate free-standing nanoscale components in bulk single-crystal diamond, including nanobeam mechanical resonators, optical waveguides, and photonic crystal and microdisk cavities. Potential applications of the fabricated prototypes range from classical and quantum photonic devices to nanomechanical-based sensors and actuators.

Original languageEnglish (US)
Pages (from-to)6084-6089
Number of pages6
JournalNano Letters
Issue number12
StatePublished - Dec 12 2012
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Bioengineering
  • General Chemistry
  • General Materials Science
  • Condensed Matter Physics
  • Mechanical Engineering


  • Nanofabrication
  • diamond
  • nanomechanical systems
  • nanophotonics
  • photonic crystal


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