Abstract
We studied charge transport through lithographycally defined Si quantum dots. At low temperatures multi-dot transport is observed. In particular, we analyzed transport through double-dot devices. The data provide compelling evidence that the extra dots are formed within the gate oxide.
Original language | English (US) |
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Pages (from-to) | 413-417 |
Number of pages | 5 |
Journal | Superlattices and Microstructures |
Volume | 28 |
Issue number | 5-6 |
DOIs | |
State | Published - Nov 2000 |
All Science Journal Classification (ASJC) codes
- General Materials Science
- Condensed Matter Physics
- Electrical and Electronic Engineering