| Original language | English |
|---|---|
| State | Published - Mar 4 2014 |
Keywords
- MEMS
- earth science
Marcus Hultmark (Inventor), Gilad Arwatz (Inventor), Yuyang Fan (Inventor), Margit Vallikivi (Inventor)
Research output: Innovation
| Original language | English |
|---|---|
| State | Published - Mar 4 2014 |