Fast Response Humidity Sensor

Marcus Hultmark (Inventor), Gilad Arwatz (Inventor), Yuyang Fan (Inventor), Margit Vallikivi (Inventor)

Research output: Innovation

Original languageEnglish
StatePublished - Mar 4 2014

Keywords

  • MEMS
  • earth science

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    Hultmark, M., Arwatz, G., Fan, Y., & Vallikivi, M. (2014). Fast Response Humidity Sensor.