Fast modeling of the low-pressure capacitively coupled radio-frequency discharge based on the nonlocal approach

S. V. Berezhnoi; I. D. Kaganovich; L. D. Tsendin; V. A. Schweigert

doi:10.1063/1.117518

Fast modeling of the low-pressure capacitively coupled radio-frequency discharge based on the nonlocal approach

S. V. Berezhnoi, I. D. Kaganovich, L. D. Tsendin, V. A. Schweigert

Research output: Contribution to journal › Article › peer-review

14 Scopus citations

Abstract

The results of modeling a low-pressure capacitively coupled radio-frequency (rf) discharge based on the nonlocal approach are reported. The approximation employed enables fast modeling (FM) of the electron distribution function. The solution of the full problem, which consists of calculation of the electron distribution, rf, and stationary electric fields, and of the plasma density profile, for simple atomic gas takes ∼10 min on the IBM PC 486DX2/66. To check the validity of the FM the full scale Monte Carlo modeling was performed. The results of the fast and the full scale modeling are in agreement.

Original language	English (US)
Pages (from-to)	2341-2343
Number of pages	3
Journal	Applied Physics Letters
Volume	69
Issue number	16
DOIs	https://doi.org/10.1063/1.117518
State	Published - Oct 14 1996
Externally published	Yes

All Science Journal Classification (ASJC) codes

Physics and Astronomy (miscellaneous)

Access to Document

10.1063/1.117518

Cite this

@article{f240b0d195ae4ceb97232292d6abef16,

title = "Fast modeling of the low-pressure capacitively coupled radio-frequency discharge based on the nonlocal approach",

abstract = "The results of modeling a low-pressure capacitively coupled radio-frequency (rf) discharge based on the nonlocal approach are reported. The approximation employed enables fast modeling (FM) of the electron distribution function. The solution of the full problem, which consists of calculation of the electron distribution, rf, and stationary electric fields, and of the plasma density profile, for simple atomic gas takes ∼10 min on the IBM PC 486DX2/66. To check the validity of the FM the full scale Monte Carlo modeling was performed. The results of the fast and the full scale modeling are in agreement.",

author = "Berezhnoi, \{S. V.\} and Kaganovich, \{I. D.\} and Tsendin, \{L. D.\} and Schweigert, \{V. A.\}",

year = "1996",

month = oct,

day = "14",

doi = "10.1063/1.117518",

language = "English (US)",

volume = "69",

pages = "2341--2343",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics",

number = "16",

}

TY - JOUR

T1 - Fast modeling of the low-pressure capacitively coupled radio-frequency discharge based on the nonlocal approach

AU - Berezhnoi, S. V.

AU - Kaganovich, I. D.

AU - Tsendin, L. D.

AU - Schweigert, V. A.

PY - 1996/10/14

Y1 - 1996/10/14

N2 - The results of modeling a low-pressure capacitively coupled radio-frequency (rf) discharge based on the nonlocal approach are reported. The approximation employed enables fast modeling (FM) of the electron distribution function. The solution of the full problem, which consists of calculation of the electron distribution, rf, and stationary electric fields, and of the plasma density profile, for simple atomic gas takes ∼10 min on the IBM PC 486DX2/66. To check the validity of the FM the full scale Monte Carlo modeling was performed. The results of the fast and the full scale modeling are in agreement.

AB - The results of modeling a low-pressure capacitively coupled radio-frequency (rf) discharge based on the nonlocal approach are reported. The approximation employed enables fast modeling (FM) of the electron distribution function. The solution of the full problem, which consists of calculation of the electron distribution, rf, and stationary electric fields, and of the plasma density profile, for simple atomic gas takes ∼10 min on the IBM PC 486DX2/66. To check the validity of the FM the full scale Monte Carlo modeling was performed. The results of the fast and the full scale modeling are in agreement.

UR - https://www.scopus.com/pages/publications/0012124220

UR - https://www.scopus.com/inward/citedby.url?scp=0012124220&partnerID=8YFLogxK

U2 - 10.1063/1.117518

DO - 10.1063/1.117518

M3 - Article

AN - SCOPUS:0012124220

SN - 0003-6951

VL - 69

SP - 2341

EP - 2343

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 16

ER -

Fast modeling of the low-pressure capacitively coupled radio-frequency discharge based on the nonlocal approach

Abstract

All Science Journal Classification (ASJC) codes

Access to Document

Other files and links

Fingerprint

Cite this