Fabrication of patterned GexSi1-x/Si layers by pulsed laser induced epitaxy

Y. Chang, S. Y. Chou, J. Kramer, T. W. Sigmon, A. F. Marshall, K. H. Weiner

Research output: Contribution to journalArticle

16 Scopus citations

Abstract

Selective growth of GexSi1-x on Si is demonstrated for the first time using a pulsed laser induced epitaxy technique, combined with either standard oxide or liftoff patterning processes. Two different dimensions of Ge0.12Si0.88/Si lateral wells are formed, 3.5 μm wide by 1700 Å deep, and 6 μm wide by 1300 Å deep. High-resolution transmission electron microscopy, combined with energy-dispersive x-ray imaging, reveals a well-defined two-dimensional (2D) Ge redistribution profile with no significant line or surface defects observed. The 2D Ge well distribution profiles, governed by heat and mass transport during the laser processing, are discussed.

Original languageEnglish (US)
Pages (from-to)2150-2152
Number of pages3
JournalApplied Physics Letters
Volume58
Issue number19
DOIs
StatePublished - Dec 1 1991
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)

Fingerprint Dive into the research topics of 'Fabrication of patterned Ge<sub>x</sub>Si<sub>1-x</sub>/Si layers by pulsed laser induced epitaxy'. Together they form a unique fingerprint.

  • Cite this

    Chang, Y., Chou, S. Y., Kramer, J., Sigmon, T. W., Marshall, A. F., & Weiner, K. H. (1991). Fabrication of patterned GexSi1-x/Si layers by pulsed laser induced epitaxy. Applied Physics Letters, 58(19), 2150-2152. https://doi.org/10.1063/1.104989