Fabrication of nanoscale gratings with reduced line edge roughness using nanoimprint lithography

Zhaoning Yu, Lei Chen, Wei Wu, Haixiong Ge, Stephen Y. Chou

Research output: Contribution to journalArticle

53 Scopus citations
Original languageEnglish (US)
Pages (from-to)2089-2092
Number of pages4
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume21
Issue number5
DOIs
StatePublished - Jan 1 2003

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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