Fabrication of nanodevices using sub-25 nm imprint lithography

Peter R. Krauss, Preston J. Renstrom, Stephen Y. Chou

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Fingerprint

Dive into the research topics of 'Fabrication of nanodevices using sub-25 nm imprint lithography'. Together they form a unique fingerprint.

Engineering & Materials Science