Fabrication of a Molecular Self-Assembled Monolayer Diode Using Nanoimprint Lithography

Michael D. Austin, Stephen Y. Chou

Research output: Contribution to journalArticlepeer-review

37 Scopus citations


We report a simple parallel process for the fabrication of nanoscale electrical contacts to probe the conductance characteristics of a molecular self-assembled monolayer (SAM) using nanoimprint lithography (NIL), a patterning technology capable of sub-10 nm resolution. We fabricated multiple samples, each with 40 gold contacts to a commonly investigated SAM, octadecanethiol (C-18). The contacts were fabricated by growing a SAM on gold nanowire and then patterning a second gold wire over the SAM. The electrical conductivity characteristics of the molecule can be reproduced between samples, suggesting a reliable fabrication process. Our procedure can be employed to study the conductance of any candidate thiol-terminated SAM of interest. Such flexibility permits extensive study of molecular devices and optimization of the processing required to merge silicon with molecular self-assembly.

Original languageEnglish (US)
Pages (from-to)1687-1690
Number of pages4
JournalNano Letters
Issue number12
StatePublished - Dec 2003

All Science Journal Classification (ASJC) codes

  • Bioengineering
  • General Chemistry
  • General Materials Science
  • Condensed Matter Physics
  • Mechanical Engineering


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