Fabrication of 70 nm channel length polymer organic thin-film transistors using nanoimprint lithography

Michael D. Austin; Stephen Y. Chou

doi:10.1063/1.1526457

Fabrication of 70 nm channel length polymer organic thin-film transistors using nanoimprint lithography

Michael D. Austin, Stephen Y. Chou

Research output: Contribution to journal › Article › peer-review

234 Scopus citations

Abstract

Short-channel polymer organic thin-film transistors (OTFT) were fabricated using nanoimprint lithography. Working devices with channel lengths from 1 μm to 70 nm were fabricated with high yields. The drive current density increases as expected, while the on/off current ratio remains 10⁴. The results showed that OTFT no longer saturate due to space charge limiting current effects.

Original language	English (US)
Pages (from-to)	4431-4433
Number of pages	3
Journal	Applied Physics Letters
Volume	81
Issue number	23
DOIs	https://doi.org/10.1063/1.1526457
State	Published - Dec 2 2002

All Science Journal Classification (ASJC) codes

Physics and Astronomy (miscellaneous)

Access to Document

10.1063/1.1526457

Cite this

@article{1c38096eedae4e9c880e52da6015f3ab,

title = "Fabrication of 70 nm channel length polymer organic thin-film transistors using nanoimprint lithography",

abstract = "Short-channel polymer organic thin-film transistors (OTFT) were fabricated using nanoimprint lithography. Working devices with channel lengths from 1 μm to 70 nm were fabricated with high yields. The drive current density increases as expected, while the on/off current ratio remains 104. The results showed that OTFT no longer saturate due to space charge limiting current effects.",

author = "Austin, \{Michael D.\} and Chou, \{Stephen Y.\}",

year = "2002",

month = dec,

day = "2",

doi = "10.1063/1.1526457",

language = "English (US)",

volume = "81",

pages = "4431--4433",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics",

number = "23",

}

TY - JOUR

T1 - Fabrication of 70 nm channel length polymer organic thin-film transistors using nanoimprint lithography

AU - Austin, Michael D.

AU - Chou, Stephen Y.

PY - 2002/12/2

Y1 - 2002/12/2

N2 - Short-channel polymer organic thin-film transistors (OTFT) were fabricated using nanoimprint lithography. Working devices with channel lengths from 1 μm to 70 nm were fabricated with high yields. The drive current density increases as expected, while the on/off current ratio remains 104. The results showed that OTFT no longer saturate due to space charge limiting current effects.

AB - Short-channel polymer organic thin-film transistors (OTFT) were fabricated using nanoimprint lithography. Working devices with channel lengths from 1 μm to 70 nm were fabricated with high yields. The drive current density increases as expected, while the on/off current ratio remains 104. The results showed that OTFT no longer saturate due to space charge limiting current effects.

UR - https://www.scopus.com/pages/publications/0037011629

UR - https://www.scopus.com/inward/citedby.url?scp=0037011629&partnerID=8YFLogxK

U2 - 10.1063/1.1526457

DO - 10.1063/1.1526457

M3 - Article

AN - SCOPUS:0037011629

SN - 0003-6951

VL - 81

SP - 4431

EP - 4433

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 23

ER -

Fabrication of 70 nm channel length polymer organic thin-film transistors using nanoimprint lithography

Abstract

All Science Journal Classification (ASJC) codes

Access to Document

Other files and links

Fingerprint

Cite this