Fabrication of 70 nm channel length polymer organic thin-film transistors using nanoimprint lithography

Michael D. Austin; Stephen Y. Chou

doi:10.1063/1.1526457

Fabrication of 70 nm channel length polymer organic thin-film transistors using nanoimprint lithography

Michael D. Austin, Stephen Y. Chou

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230 Scopus citations

Abstract

Short-channel polymer organic thin-film transistors (OTFT) were fabricated using nanoimprint lithography. Working devices with channel lengths from 1 μm to 70 nm were fabricated with high yields. The drive current density increases as expected, while the on/off current ratio remains 10⁴. The results showed that OTFT no longer saturate due to space charge limiting current effects.

Original language	English (US)
Pages (from-to)	4431-4433
Number of pages	3
Journal	Applied Physics Letters
Volume	81
Issue number	23
DOIs	https://doi.org/10.1063/1.1526457
State	Published - Dec 2 2002

All Science Journal Classification (ASJC) codes

Physics and Astronomy (miscellaneous)

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10.1063/1.1526457

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title = "Fabrication of 70 nm channel length polymer organic thin-film transistors using nanoimprint lithography",

abstract = "Short-channel polymer organic thin-film transistors (OTFT) were fabricated using nanoimprint lithography. Working devices with channel lengths from 1 μm to 70 nm were fabricated with high yields. The drive current density increases as expected, while the on/off current ratio remains 104. The results showed that OTFT no longer saturate due to space charge limiting current effects.",

author = "Austin, {Michael D.} and Chou, {Stephen Y.}",

year = "2002",

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doi = "10.1063/1.1526457",

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journal = "Applied Physics Letters",

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number = "23",

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AU - Austin, Michael D.

AU - Chou, Stephen Y.

PY - 2002/12/2

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N2 - Short-channel polymer organic thin-film transistors (OTFT) were fabricated using nanoimprint lithography. Working devices with channel lengths from 1 μm to 70 nm were fabricated with high yields. The drive current density increases as expected, while the on/off current ratio remains 104. The results showed that OTFT no longer saturate due to space charge limiting current effects.

AB - Short-channel polymer organic thin-film transistors (OTFT) were fabricated using nanoimprint lithography. Working devices with channel lengths from 1 μm to 70 nm were fabricated with high yields. The drive current density increases as expected, while the on/off current ratio remains 104. The results showed that OTFT no longer saturate due to space charge limiting current effects.

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U2 - 10.1063/1.1526457

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M3 - Article

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JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 23

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Fabrication of 70 nm channel length polymer organic thin-film transistors using nanoimprint lithography

Abstract

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