Fabrication of 70 nm channel length polymer organic thin-film transistors using nanoimprint lithography

Michael D. Austin, Stephen Y. Chou

Research output: Contribution to journalArticle

221 Scopus citations

Abstract

Short-channel polymer organic thin-film transistors (OTFT) were fabricated using nanoimprint lithography. Working devices with channel lengths from 1 μm to 70 nm were fabricated with high yields. The drive current density increases as expected, while the on/off current ratio remains 104. The results showed that OTFT no longer saturate due to space charge limiting current effects.

Original languageEnglish (US)
Pages (from-to)4431-4433
Number of pages3
JournalApplied Physics Letters
Volume81
Issue number23
DOIs
StatePublished - Dec 2 2002

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)

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