Fabrication of 60-nm transistors on 4-in. wafer using nanoimprint at all lithography levels

Wei Zhang; Stephen Y. Chou

doi:10.1063/1.1600505

Fabrication of 60-nm transistors on 4-in. wafer using nanoimprint at all lithography levels

Wei Zhang, Stephen Y. Chou

Research output: Contribution to journal › Article › peer-review

106 Scopus citations

Abstract

The fabrication of 60-nm metal-oxide-semiconduictor field-effect transistors was carried out using nanoimprint lithography (NIL). The nanotransistors exhibit excellent operational characteristics across the wafer. The results show a significant advance in nanoimprint development and its application in manufacturing of integrated electrical, optical, chemical, and biological nanocircuits.

Original language	English (US)
Pages (from-to)	1632-1634
Number of pages	3
Journal	Applied Physics Letters
Volume	83
Issue number	8
DOIs	https://doi.org/10.1063/1.1600505
State	Published - Aug 25 2003

All Science Journal Classification (ASJC) codes

Physics and Astronomy (miscellaneous)

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10.1063/1.1600505

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title = "Fabrication of 60-nm transistors on 4-in. wafer using nanoimprint at all lithography levels",

abstract = "The fabrication of 60-nm metal-oxide-semiconduictor field-effect transistors was carried out using nanoimprint lithography (NIL). The nanotransistors exhibit excellent operational characteristics across the wafer. The results show a significant advance in nanoimprint development and its application in manufacturing of integrated electrical, optical, chemical, and biological nanocircuits.",

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AB - The fabrication of 60-nm metal-oxide-semiconduictor field-effect transistors was carried out using nanoimprint lithography (NIL). The nanotransistors exhibit excellent operational characteristics across the wafer. The results show a significant advance in nanoimprint development and its application in manufacturing of integrated electrical, optical, chemical, and biological nanocircuits.

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Fabrication of 60-nm transistors on 4-in. wafer using nanoimprint at all lithography levels

Abstract

All Science Journal Classification (ASJC) codes

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