Fabrication and properties of epitaxial ferroelectric heterostructures with (SrRuO3) isotropic metallic oxide electrodes

C. B. Eom; R. B. Van Dover; Julia M. Phillips; D. J. Werder; J. H. Marshall; C. H. Chen; R. J. Cava; R. M. Fleming; D. K. Fork

doi:10.1063/1.110436

Fabrication and properties of epitaxial ferroelectric heterostructures with (SrRuO₃) isotropic metallic oxide electrodes

C. B. Eom, R. B. Van Dover, Julia M. Phillips, D. J. Werder, J. H. Marshall, C. H. Chen, R. J. Cava, R. M. Fleming, D. K. Fork

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424 Scopus citations

Abstract

Epitaxial ferroelectric SrRuO₃/Pb(Zr_0.52Ti _0.48)O₃/SrRuO₃ heterostructures have been fabricated employing isotropic metallic oxide electrodes on (100) SrTiO ₃ and (100) Si with an yttria stabilized zirconia buffer layer. The structures have been grown in situ by 90°off-axis sputtering, which allows the growth of uniform stoichiometric films over large areas with excellent step coverage. X-ray diffraction, Rutherford backscattering spectroscopy, and cross-sectional transmission electron microscopy reveal high crystalline quality and coherent interfaces. They exhibit superior fatigue characteristics over those made with metal electrodes, showing little degradation over 10 ¹⁰ cycles, with a large remnant polarization.

Original language	English (US)
Pages (from-to)	2570-2572
Number of pages	3
Journal	Applied Physics Letters
Volume	63
Issue number	18
DOIs	https://doi.org/10.1063/1.110436
State	Published - 1993
Externally published	Yes

All Science Journal Classification (ASJC) codes

Physics and Astronomy (miscellaneous)

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10.1063/1.110436

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title = "Fabrication and properties of epitaxial ferroelectric heterostructures with (SrRuO3) isotropic metallic oxide electrodes",

abstract = "Epitaxial ferroelectric SrRuO3/Pb(Zr0.52Ti 0.48)O3/SrRuO3 heterostructures have been fabricated employing isotropic metallic oxide electrodes on (100) SrTiO 3 and (100) Si with an yttria stabilized zirconia buffer layer. The structures have been grown in situ by 90°off-axis sputtering, which allows the growth of uniform stoichiometric films over large areas with excellent step coverage. X-ray diffraction, Rutherford backscattering spectroscopy, and cross-sectional transmission electron microscopy reveal high crystalline quality and coherent interfaces. They exhibit superior fatigue characteristics over those made with metal electrodes, showing little degradation over 10 10 cycles, with a large remnant polarization.",

author = "Eom, {C. B.} and {Van Dover}, {R. B.} and Phillips, {Julia M.} and Werder, {D. J.} and Marshall, {J. H.} and Chen, {C. H.} and Cava, {R. J.} and Fleming, {R. M.} and Fork, {D. K.}",

year = "1993",

doi = "10.1063/1.110436",

language = "English (US)",

volume = "63",

pages = "2570--2572",

journal = "Applied Physics Letters",

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publisher = "American Institute of Physics Publising LLC",

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TY - JOUR

T1 - Fabrication and properties of epitaxial ferroelectric heterostructures with (SrRuO3) isotropic metallic oxide electrodes

AU - Eom, C. B.

AU - Van Dover, R. B.

AU - Phillips, Julia M.

AU - Werder, D. J.

AU - Marshall, J. H.

AU - Chen, C. H.

AU - Cava, R. J.

AU - Fleming, R. M.

AU - Fork, D. K.

PY - 1993

Y1 - 1993

N2 - Epitaxial ferroelectric SrRuO3/Pb(Zr0.52Ti 0.48)O3/SrRuO3 heterostructures have been fabricated employing isotropic metallic oxide electrodes on (100) SrTiO 3 and (100) Si with an yttria stabilized zirconia buffer layer. The structures have been grown in situ by 90°off-axis sputtering, which allows the growth of uniform stoichiometric films over large areas with excellent step coverage. X-ray diffraction, Rutherford backscattering spectroscopy, and cross-sectional transmission electron microscopy reveal high crystalline quality and coherent interfaces. They exhibit superior fatigue characteristics over those made with metal electrodes, showing little degradation over 10 10 cycles, with a large remnant polarization.

AB - Epitaxial ferroelectric SrRuO3/Pb(Zr0.52Ti 0.48)O3/SrRuO3 heterostructures have been fabricated employing isotropic metallic oxide electrodes on (100) SrTiO 3 and (100) Si with an yttria stabilized zirconia buffer layer. The structures have been grown in situ by 90°off-axis sputtering, which allows the growth of uniform stoichiometric films over large areas with excellent step coverage. X-ray diffraction, Rutherford backscattering spectroscopy, and cross-sectional transmission electron microscopy reveal high crystalline quality and coherent interfaces. They exhibit superior fatigue characteristics over those made with metal electrodes, showing little degradation over 10 10 cycles, with a large remnant polarization.

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Fabrication and properties of epitaxial ferroelectric heterostructures with (SrRuO₃) isotropic metallic oxide electrodes

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