Fabrication and properties of epitaxial ferroelectric heterostructures with (SrRuO3) isotropic metallic oxide electrodes

C. B. Eom, R. B. Van Dover, Julia M. Phillips, D. J. Werder, J. H. Marshall, C. H. Chen, R. J. Cava, R. M. Fleming, D. K. Fork

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Abstract

Epitaxial ferroelectric SrRuO3/Pb(Zr0.52Ti 0.48)O3/SrRuO3 heterostructures have been fabricated employing isotropic metallic oxide electrodes on (100) SrTiO 3 and (100) Si with an yttria stabilized zirconia buffer layer. The structures have been grown in situ by 90°off-axis sputtering, which allows the growth of uniform stoichiometric films over large areas with excellent step coverage. X-ray diffraction, Rutherford backscattering spectroscopy, and cross-sectional transmission electron microscopy reveal high crystalline quality and coherent interfaces. They exhibit superior fatigue characteristics over those made with metal electrodes, showing little degradation over 10 10 cycles, with a large remnant polarization.

Original languageEnglish (US)
Pages (from-to)2570-2572
Number of pages3
JournalApplied Physics Letters
Volume63
Issue number18
DOIs
StatePublished - Dec 1 1993
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)

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    Eom, C. B., Van Dover, R. B., Phillips, J. M., Werder, D. J., Marshall, J. H., Chen, C. H., Cava, R. J., Fleming, R. M., & Fork, D. K. (1993). Fabrication and properties of epitaxial ferroelectric heterostructures with (SrRuO3) isotropic metallic oxide electrodes. Applied Physics Letters, 63(18), 2570-2572. https://doi.org/10.1063/1.110436