Epitaxial ferroelectric SrRuO3/Pb(Zr0.52Ti 0.48)O3/SrRuO3 heterostructures have been fabricated employing isotropic metallic oxide electrodes on (100) SrTiO 3 and (100) Si with an yttria stabilized zirconia buffer layer. The structures have been grown in situ by 90°off-axis sputtering, which allows the growth of uniform stoichiometric films over large areas with excellent step coverage. X-ray diffraction, Rutherford backscattering spectroscopy, and cross-sectional transmission electron microscopy reveal high crystalline quality and coherent interfaces. They exhibit superior fatigue characteristics over those made with metal electrodes, showing little degradation over 10 10 cycles, with a large remnant polarization.
All Science Journal Classification (ASJC) codes
- Physics and Astronomy (miscellaneous)