Fabrication and performance of thin amorphous Si subwavelength transmission grating for controlling vertical cavity surface emitting laser polarization

Physics & Astronomy

• surface emitting lasers 74%
• gratings 50%
• cavities 43%
• fabrication 42%
• polarization 37%
• performance 30%
• locking 13%
• lithography 11%
• transmittance 11%
• silicon dioxide 10%
• etching 10%
• electron beams 10%
• reflectance 9%
• augmentation 8%
• output 8%
• ions 6%

Engineering & Materials Science

• Surface emitting lasers 100%
• Polarization 64%
• Fabrication 52%
• Optical feedback 24%
• Electron beam lithography 21%
• Fused silica 19%
• Reactive ion etching 19%
• Substrates 9%
• Feedback 8%