Fabrication and characterization of room temperature silicon single electron memory

Keyphrases

• Room Temperature 100%
• Single Electron Memory 100%
• Floating Gate 100%
• Electron Beam Lithography 50%
• Crystalline Silicon 50%
• Reactive Ion Etching 50%
• Threshold Voltage 50%
• Charging Process 50%
• Self-limiting 50%
• Lift-off 50%
• Single-electron Charging 50%
• Channel Width 50%
• Transistor Channel 50%
• Charging Effect 50%

Engineering

• Room Temperature 100%
• Single Electron 100%
• Nanoscale 66%
• Floating Gate 66%
• Electron Optical Lithography 33%
• Crystalline Silicon 33%
• Charging Process 33%
• Electron Charging Effect 33%
• Channel Transistor 33%

Material Science

• Silicon 100%
• Reactive Ion Etching 50%
• Transistor 50%
• Lithography 50%