Fabrication and characterization of room temperature silicon single electron memory

Keyphrases

• Single Electron Memory 100%
• Single-electron Charging 50%
• Charging Effect 50%
• Channel Width 50%
• Transistor Channel 50%

Material Science

• Silicon 100%
• Crystalline Material 50%
• Reactive Ion Etching 50%
• Transistor 50%
• Lithography 50%

Engineering

• Electron Charging Effect 33%
• Channel Transistor 33%