Fabrication and characterization of a novel nanoscale thermal anemometry probe

Engineering

• Turbulent Flow 100%
• Nanoscale 100%
• Temporal Resolution 50%
• Spatial Resolution 50%
• Frequency Response 50%
• Conductive 50%
• Microelectromechanical System 50%
• Microfabrication 50%
• Hot Wire Anemometer 50%
• Velocity Fluctuation 50%
• Deep Reactive Ion Etching 50%
• Process Yield 50%

Earth and Planetary Sciences

• Velocity Measurement 100%
• Turbulent Flow 50%
• Hot-Wire Anemometer 25%

Keyphrases

• 3D Silicon 33%
• High-yield Processes 33%
• Batch Fabrication 33%