Fabrication and characteristics of free standing shaped pupil masks for TPF-coronagraph

Kunjithapatham Balasubramanian, Pierre M. Echternach, Matthew R. Dickie, Richard E. Muller, Victor E. White, Daniel J. Hoppe, Stuart B. Shaklan, Ruslan Belikov, N. Jeremy Kasdin, Robert J. Vanderbei, Daniel Ceperley, Andrew R. Neureuther

Research output: Chapter in Book/Report/Conference proceedingConference contribution

13 Scopus citations

Abstract

Direct imaging and characterization of exo-solar terrestrial planets require coronagraphic instruments capable of suppressing star light to 10 -10. Pupil shaping masks have been proposed and designed1 at Princeton University to accomplish such a goal. Based on Princeton designs, free standing (without a substrate) silicon masks have been fabricated with lithographic and deep etching techniques. In this paper, we discuss the fabrication of such masks and present their physical and optical characteristics in relevance to their performance over the visible to near IR bandwidth.

Original languageEnglish (US)
Title of host publicationSpace Telescopes and Instrumentation I
Subtitle of host publicationOptical, Infrared, and Millimeter
DOIs
StatePublished - Oct 2 2006
EventSpace Telescopes and Instrumentation I: Optical, Infrared, and Millimeter - Orlando, FL, United States
Duration: May 24 2006May 31 2006

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume6265 II
ISSN (Print)0277-786X

Other

OtherSpace Telescopes and Instrumentation I: Optical, Infrared, and Millimeter
CountryUnited States
CityOrlando, FL
Period5/24/065/31/06

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Keywords

  • Coronagraph
  • DRIE
  • Shaped pupil mask
  • Terrestrial Planet Finder

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    Balasubramanian, K., Echternach, P. M., Dickie, M. R., Muller, R. E., White, V. E., Hoppe, D. J., Shaklan, S. B., Belikov, R., Jeremy Kasdin, N., Vanderbei, R. J., Ceperley, D., & Neureuther, A. R. (2006). Fabrication and characteristics of free standing shaped pupil masks for TPF-coronagraph. In Space Telescopes and Instrumentation I: Optical, Infrared, and Millimeter [62653N] (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 6265 II). https://doi.org/10.1117/12.673251