@inproceedings{88ec9f012767490aa421cc3dfc59d8fd,
title = "Fabrication and characteristics of free standing shaped pupil masks for TPF-coronagraph",
abstract = "Direct imaging and characterization of exo-solar terrestrial planets require coronagraphic instruments capable of suppressing star light to 10 -10. Pupil shaping masks have been proposed and designed1 at Princeton University to accomplish such a goal. Based on Princeton designs, free standing (without a substrate) silicon masks have been fabricated with lithographic and deep etching techniques. In this paper, we discuss the fabrication of such masks and present their physical and optical characteristics in relevance to their performance over the visible to near IR bandwidth.",
keywords = "Coronagraph, DRIE, Shaped pupil mask, Terrestrial Planet Finder",
author = "Kunjithapatham Balasubramanian and Echternach, {Pierre M.} and Dickie, {Matthew R.} and Muller, {Richard E.} and White, {Victor E.} and Hoppe, {Daniel J.} and Shaklan, {Stuart B.} and Ruslan Belikov and {Jeremy Kasdin}, N. and Vanderbei, {Robert J.} and Daniel Ceperley and Neureuther, {Andrew R.}",
year = "2006",
doi = "10.1117/12.673251",
language = "English (US)",
isbn = "0819463302",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "Space Telescopes and Instrumentation I",
note = "Space Telescopes and Instrumentation I: Optical, Infrared, and Millimeter ; Conference date: 24-05-2006 Through 31-05-2006",
}