Extreme-ultraviolet polarization and filtering with gold transmission gratings

Earl E. Scime, Erik H. Anderson, David J. McComas, Mark L. Schattenburg

Research output: Contribution to journalArticlepeer-review

45 Scopus citations


The polarization and transmission characteristics of freestanding gold transmission gratings, with 200-nm periods, for extreme-ultraviolet (EUV) radiation (l < 200 nm) have been measured. We find that EUV transmission through the gratings is dominated by the waveguide characteristics of the gratings and that polarization efficiencies of 90% for wavelengths of 121.6 nm are achievable. Both the EUV polarization and transmission properties are in good agreement with a complete vector, numerical solution of Maxwell’s equations. The fraction of open area to total area of the grating has been measured using a 10-keV proton beam and was found to be in good agreement with the microscopic slit and wire dimensions that were obtained by scanning electron microscopy. The use of these gratings for particle measurements in the presence of intense EUV radiation is briefly discussed.

Original languageEnglish (US)
Pages (from-to)648-654
Number of pages7
JournalApplied Optics
Issue number4
StatePublished - Feb 1995
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Engineering (miscellaneous)
  • Atomic and Molecular Physics, and Optics
  • Electrical and Electronic Engineering


  • Transmission gratings
  • Ultraviolet polarization


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