TY - JOUR
T1 - Evolution of the parallel and perpendicular ion velocity distribution functions in pulsed helicon plasma sources obtained by time resolved laser induced fluorescence
AU - Biloiu, Costel
AU - Sun, Xuan
AU - Choueiri, Edgar
AU - Doss, Forrest
AU - Scime, Earl
AU - Heard, John
AU - Spektor, Rostislav
AU - Ventura, Daniel
PY - 2005/11/1
Y1 - 2005/11/1
N2 - The temporal evolution of parallel and perpendicular ion velocity distribution functions (ivdf) in a pulsed, helicon-generated, expanding, argon plasma is presented. The ivdf's temporal evolution during the pulse was determined with time resolved (1 ms resolution), laser induced fluorescence. The parallel ivdf measurements indicate that, in the expansion region of the plasma and for certain operational parameters, two ion populations exist: a population moving at supersonic speeds (1.1 Mach) resulting from acceleration in an electric double layer (EDL) and a slow moving population (0.7 Mach) generated by local ionization. After 100 ms, although present, the EDL is not fully developed and has not reached a steady-state. Measurements of the perpendicular ivdf indicate constant radial expansion, with ion speeds of ≈400 m s -1, in the expansion region.
AB - The temporal evolution of parallel and perpendicular ion velocity distribution functions (ivdf) in a pulsed, helicon-generated, expanding, argon plasma is presented. The ivdf's temporal evolution during the pulse was determined with time resolved (1 ms resolution), laser induced fluorescence. The parallel ivdf measurements indicate that, in the expansion region of the plasma and for certain operational parameters, two ion populations exist: a population moving at supersonic speeds (1.1 Mach) resulting from acceleration in an electric double layer (EDL) and a slow moving population (0.7 Mach) generated by local ionization. After 100 ms, although present, the EDL is not fully developed and has not reached a steady-state. Measurements of the perpendicular ivdf indicate constant radial expansion, with ion speeds of ≈400 m s -1, in the expansion region.
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U2 - 10.1088/0963-0252/14/4/016
DO - 10.1088/0963-0252/14/4/016
M3 - Article
AN - SCOPUS:27744590526
SN - 0963-0252
VL - 14
SP - 766
EP - 776
JO - Plasma Sources Science and Technology
JF - Plasma Sources Science and Technology
IS - 4
ER -