Epitaxial ferroelectric heterostructures of isotropic metallic oxide (SrRuO3) and Pb(Zr0.52Ti0.48)O3

C. B. Eom; R. B. Van Dover; Julia M. Philips; R. M. Fleming; R. J. Cava; J. H. Marshall; D. J. Werder; C. H. Chen; D. K. Fork

Epitaxial ferroelectric heterostructures of isotropic metallic oxide (SrRuO₃) and Pb(Zr_0.52Ti_0.48)O₃

C. B. Eom, R. B. Van Dover, Julia M. Philips, R. M. Fleming, R. J. Cava, J. H. Marshall, D. J. Werder, C. H. Chen, D. K. Fork

Research output: Contribution to journal › Conference article › peer-review

27 Scopus citations

Abstract

We have fabricated epitaxial ferroelectric heterostructures of isotropic metallic oxide (SrRuO₃) and ferroelectric thin films (SrRuO₃/Pb(Zr_0.52Ti_0.48)O₃/SrRuO₃) on (100) SrTiO₃ and YSZ buffer layered Si substrates by 90° off-axis sputtering. These heterostructures have high crystalline quality and coherent interfaces as revealed by X-ray diffraction. Rutherford backscattering spectroscopy and cross-sectional transmission electron microscopy. The ferroelectric layers exhibit superior fatigue characteristics over 10¹⁰ cycles with large remnant polarization.

Original language	English (US)
Pages (from-to)	145-150
Number of pages	6
Journal	Materials Research Society Symposium - Proceedings
Volume	310
State	Published - 1993
Externally published	Yes
Event	Proceedings of the 1993 Spring Meeting of the Materials Research Society - San Francisco, CA, USA Duration: Apr 16 1993 → Apr 20 1993

All Science Journal Classification (ASJC) codes

General Materials Science
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

Cite this

@article{4d926c032c2f463aa3ebc342375fb964,

title = "Epitaxial ferroelectric heterostructures of isotropic metallic oxide (SrRuO3) and Pb(Zr0.52Ti0.48)O3",

abstract = "We have fabricated epitaxial ferroelectric heterostructures of isotropic metallic oxide (SrRuO3) and ferroelectric thin films (SrRuO3/Pb(Zr0.52Ti0.48)O3/SrRuO3) on (100) SrTiO3 and YSZ buffer layered Si substrates by 90° off-axis sputtering. These heterostructures have high crystalline quality and coherent interfaces as revealed by X-ray diffraction. Rutherford backscattering spectroscopy and cross-sectional transmission electron microscopy. The ferroelectric layers exhibit superior fatigue characteristics over 1010 cycles with large remnant polarization.",

author = "Eom, {C. B.} and {Van Dover}, {R. B.} and Philips, {Julia M.} and Fleming, {R. M.} and Cava, {R. J.} and Marshall, {J. H.} and Werder, {D. J.} and Chen, {C. H.} and Fork, {D. K.}",

year = "1993",

language = "English (US)",

volume = "310",

pages = "145--150",

journal = "Materials Research Society Symposium - Proceedings",

issn = "0272-9172",

publisher = "Materials Research Society",

note = "Proceedings of the 1993 Spring Meeting of the Materials Research Society ; Conference date: 16-04-1993 Through 20-04-1993",

}

TY - JOUR

T1 - Epitaxial ferroelectric heterostructures of isotropic metallic oxide (SrRuO3) and Pb(Zr0.52Ti0.48)O3

AU - Eom, C. B.

AU - Van Dover, R. B.

AU - Philips, Julia M.

AU - Fleming, R. M.

AU - Cava, R. J.

AU - Marshall, J. H.

AU - Werder, D. J.

AU - Chen, C. H.

AU - Fork, D. K.

PY - 1993

Y1 - 1993

N2 - We have fabricated epitaxial ferroelectric heterostructures of isotropic metallic oxide (SrRuO3) and ferroelectric thin films (SrRuO3/Pb(Zr0.52Ti0.48)O3/SrRuO3) on (100) SrTiO3 and YSZ buffer layered Si substrates by 90° off-axis sputtering. These heterostructures have high crystalline quality and coherent interfaces as revealed by X-ray diffraction. Rutherford backscattering spectroscopy and cross-sectional transmission electron microscopy. The ferroelectric layers exhibit superior fatigue characteristics over 1010 cycles with large remnant polarization.

AB - We have fabricated epitaxial ferroelectric heterostructures of isotropic metallic oxide (SrRuO3) and ferroelectric thin films (SrRuO3/Pb(Zr0.52Ti0.48)O3/SrRuO3) on (100) SrTiO3 and YSZ buffer layered Si substrates by 90° off-axis sputtering. These heterostructures have high crystalline quality and coherent interfaces as revealed by X-ray diffraction. Rutherford backscattering spectroscopy and cross-sectional transmission electron microscopy. The ferroelectric layers exhibit superior fatigue characteristics over 1010 cycles with large remnant polarization.

UR - http://www.scopus.com/inward/record.url?scp=0027874596&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0027874596&partnerID=8YFLogxK

M3 - Conference article

AN - SCOPUS:0027874596

SN - 0272-9172

VL - 310

SP - 145

EP - 150

JO - Materials Research Society Symposium - Proceedings

JF - Materials Research Society Symposium - Proceedings

T2 - Proceedings of the 1993 Spring Meeting of the Materials Research Society

Y2 - 16 April 1993 through 20 April 1993

ER -

Epitaxial ferroelectric heterostructures of isotropic metallic oxide (SrRuO₃) and Pb(Zr_0.52Ti_0.48)O₃

Abstract

All Science Journal Classification (ASJC) codes

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