Epitaxial ferroelectric heterostructures of isotropic metallic oxide (SrRuO3) and Pb(Zr0.52Ti0.48)O3

C. B. Eom, R. B. Van Dover, Julia M. Philips, R. M. Fleming, R. J. Cava, J. H. Marshall, D. J. Werder, C. H. Chen, D. K. Fork

Research output: Contribution to journalConference articlepeer-review

27 Scopus citations

Abstract

We have fabricated epitaxial ferroelectric heterostructures of isotropic metallic oxide (SrRuO3) and ferroelectric thin films (SrRuO3/Pb(Zr0.52Ti0.48)O3/SrRuO3) on (100) SrTiO3 and YSZ buffer layered Si substrates by 90° off-axis sputtering. These heterostructures have high crystalline quality and coherent interfaces as revealed by X-ray diffraction. Rutherford backscattering spectroscopy and cross-sectional transmission electron microscopy. The ferroelectric layers exhibit superior fatigue characteristics over 1010 cycles with large remnant polarization.

Original languageEnglish (US)
Pages (from-to)145-150
Number of pages6
JournalMaterials Research Society Symposium - Proceedings
Volume310
StatePublished - Dec 1 1993
Externally publishedYes
EventProceedings of the 1993 Spring Meeting of the Materials Research Society - San Francisco, CA, USA
Duration: Apr 16 1993Apr 20 1993

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

Fingerprint Dive into the research topics of 'Epitaxial ferroelectric heterostructures of isotropic metallic oxide (SrRuO<sub>3</sub>) and Pb(Zr<sub>0.52</sub>Ti<sub>0.48</sub>)O<sub>3</sub>'. Together they form a unique fingerprint.

Cite this