Electron heating in low-pressure rf glow discharges

M. Surendra, D. B. Graves, I. J. Morey

Research output: Contribution to journalArticlepeer-review

116 Scopus citations

Abstract

Particle-in-cell simulations of radio frequency glow discharges between parallel-plate electrodes were performed to test the role of secondary emission at applied frequencies above the ion plasma frequency. With the secondary electron emission coefficient set to zero, the high-energy tail of the electron energy distribution function in the center of the glow is modulated at the applied frequency, and these energetic electrons show substantial anisotropy. In addition, a pulse of ionization propagates across the glow, correpsonding to the directed velocity of the high-energy electrons in the center of the glow. These high-energy electrons originate at the plasma-sheath boundary and appear to be the result of sheath heating.

Original languageEnglish (US)
Pages (from-to)1022-1024
Number of pages3
JournalApplied Physics Letters
Volume56
Issue number11
DOIs
StatePublished - 1990
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)

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