Electrical activation and electron spin resonance measurements of implanted bismuth in isotopically enriched silicon-28

  • C. D. Weis
  • , C. C. Lo
  • , V. Lang
  • , A. M. Tyryshkin
  • , R. E. George
  • , K. M. Yu
  • , J. Bokor
  • , S. A. Lyon
  • , J. J.L. Morton
  • , T. Schenkel

Research output: Contribution to journalArticlepeer-review

48 Scopus citations

Abstract

We have performed continuous wave and pulsed electron spin resonance measurements of implanted bismuth donors in isotopically enriched silicon-28. Donors are electrically activated via thermal annealing with minimal diffusion. Damage from bismuth ion implantation is repaired during thermal annealing as evidenced by narrow spin resonance linewidths (B pp = 12 μT) and long spin coherence times (T 2 = 0. 7 ms, at temperature T = 8 K). The results qualify ion implanted bismuth as a promising candidate for spin qubit integration in silicon.

Original languageEnglish (US)
Article number172104
JournalApplied Physics Letters
Volume100
Issue number17
DOIs
StatePublished - Apr 23 2012

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)

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