Effects of polymer viscosity on lithographically-induced self-assembly of periodic microstructures

Lei Chen, Lei Zhuang, Xiaoyun Sun, Paru Deshpande, Stephen Y. Chou

Research output: Contribution to journalConference article

Abstract

Lithographically-induced self-assembly (LISA) is a newly discovered pattern formation phenomenon where a plate called mask, placed a distance above a thin polymer film heated above Tg, causes the polymer film to flatten on another plate and to assemble into periodic micro-pillar arrays. The observation of other patterns, such as concentric rings and parallel lines in LISA is described in polymethyl methacrylate films. It is found that the polymer viscosity plays a key role in determining the micropatterns formed in LISA. At a lower viscosity, periodic pillars are formed while at a higher viscosity, concentric rings are formed.

Original languageEnglish (US)
Number of pages1
JournalAmerican Chemical Society, Polymer Preprints, Division of Polymer Chemistry
Volume41
Issue number1
StatePublished - Mar 1 2000
EventThe San Francisco Meeting - San Francisco, CA, USA
Duration: Mar 26 2000Mar 31 2000

All Science Journal Classification (ASJC) codes

  • Polymers and Plastics

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