Effectiveness of electron-cyclotron and transmission resonance heating in inductively coupled plasmas

  • Oleg V. Polomarov
  • , Constantine E. Theodosiou
  • , Igor D. Kaganovich
  • , Badri N. Ramamurthi
  • , Demetre J. Economou

Research output: Contribution to journal › Article › peer-review

9 Scopus citations

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