Effectiveness of electron-cyclotron and transmission resonance heating in inductively coupled plasmas

The electron-cyclotron and transmission resonances in magnetically enhanced low-pressure one-dimensional uniform inductively coupled plasmas are studied analytically within a simple model of two driven electrodes. The results of our approach are also applicable to the case of one grounded electrode. It is shown that, for a high discharge frequency, the plasma resistance is greatly enhanced at electron-cyclotron and transmission resonances, but normally does not exhibit a sharp peak at the electron-cyclotron resonance (ECR) condition. For a low discharge frequency, the ECR heating is not effective. Conditions of strong transmission resonances are identified. A transition from a bounded to semi-infinite plasma with overlapping of transmission resonances is also considered.