Abstract
A two-dimensional hole gas in the Si1-x-yGexCy channel on a Si(100) substrate has been demonstrated at temperatures from 0.3 to 300 K. The hole mobility decreases as more C is added. The hole effective mass has also been measured based on the analysis of the temperature dependence of Shubnikov-de Haas oscillations. It is found that the addition of C, up to 0.6%, does not change the effective mass of holes in Si1-xGex. It suggests that the valence band structure of Si1-x-yGexCy is similar to that of Si1-x-yGexCy.
Original language | English (US) |
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Pages (from-to) | 51-54 |
Number of pages | 4 |
Journal | Thin Solid Films |
Volume | 321 |
Issue number | 1-2 |
DOIs | |
State | Published - May 26 1998 |
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Surfaces and Interfaces
- Surfaces, Coatings and Films
- Metals and Alloys
- Materials Chemistry
Keywords
- 2D hole gas
- Mass measurement
- Si(100)