Effect of neutral transport on the etch product lifecycle during plasma etching of silicon in chlorine gas

Keyphrases

• Product Life Cycle 100%
• Plasma Etching 100%
• Chlorine Gas 100%
• Neutral Transport 100%
• Chlorine 50%
• Gas Flow Rate 50%
• Wafer 50%
• Charged Species 50%
• Transport Reaction 50%
• Gasses 50%
• Inlet Position 50%
• Reaction Coupling 50%
• Collisional Coupling 50%
• Silicon Etching 50%

Material Science

• Silicon 100%
• Plasma Etching 100%
• Gas Flow 33%

Chemical Engineering

• Chlorine 100%