Fingerprint
Dive into the research topics of 'Effect of neutral transport on the etch product lifecycle during plasma etching of silicon in chlorine gas'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Effect of neutral transport on the etch product lifecycle during plasma etching of silicon in chlorine gas
Mark W. Kiehlbauch, David B. Graves
Research output: Contribution to journal › Article › peer-review
27
Scopus
citations