Dynamics of uniform Si/SiGe uniaxial strain generation on compliant insulating substrates

R. L. Peterson; J. C. Sturm

doi:10.1109/istdm.2006.246553

Dynamics of uniform Si/SiGe uniaxial strain generation on compliant insulating substrates

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English (US)
Title of host publication	Third International SiGe Technology and Device Meeting, ISTDM 2006 - Conference Digest
Publisher	IEEE Computer Society
ISBN (Print)	1424404614, 9781424404612
DOIs	https://doi.org/10.1109/istdm.2006.246553
State	Published - 2006
Event	Third International SiGe Technology and Device Meeting, ISTDM 2006 - Princeton, NJ, United States Duration: May 15 2006 → May 17 2006

Publication series

Name	Third International SiGe Technology and Device Meeting, ISTDM 2006 - Conference Digest
Volume	2006

Other

Other	Third International SiGe Technology and Device Meeting, ISTDM 2006
Country/Territory	United States
City	Princeton, NJ
Period	5/15/06 → 5/17/06

All Science Journal Classification (ASJC) codes

General Computer Science
Electrical and Electronic Engineering
Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics

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10.1109/istdm.2006.246553

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Peterson, R. L., & Sturm, J. C. (2006). Dynamics of uniform Si/SiGe uniaxial strain generation on compliant insulating substrates. In Third International SiGe Technology and Device Meeting, ISTDM 2006 - Conference Digest Article 1716047 (Third International SiGe Technology and Device Meeting, ISTDM 2006 - Conference Digest; Vol. 2006). IEEE Computer Society. https://doi.org/10.1109/istdm.2006.246553

@inproceedings{3531fa3e817544459ab7fa3cca1c4f11,

title = "Dynamics of uniform Si/SiGe uniaxial strain generation on compliant insulating substrates",

author = "Peterson, {R. L.} and Sturm, {J. C.}",

year = "2006",

doi = "10.1109/istdm.2006.246553",

language = "English (US)",

isbn = "1424404614",

series = "Third International SiGe Technology and Device Meeting, ISTDM 2006 - Conference Digest",

publisher = "IEEE Computer Society",

booktitle = "Third International SiGe Technology and Device Meeting, ISTDM 2006 - Conference Digest",

address = "United States",

note = "Third International SiGe Technology and Device Meeting, ISTDM 2006 ; Conference date: 15-05-2006 Through 17-05-2006",

}

Peterson, RL & Sturm, JC 2006, Dynamics of uniform Si/SiGe uniaxial strain generation on compliant insulating substrates. in Third International SiGe Technology and Device Meeting, ISTDM 2006 - Conference Digest., 1716047, Third International SiGe Technology and Device Meeting, ISTDM 2006 - Conference Digest, vol. 2006, IEEE Computer Society, Third International SiGe Technology and Device Meeting, ISTDM 2006, Princeton, NJ, United States, 5/15/06. https://doi.org/10.1109/istdm.2006.246553

Dynamics of uniform Si/SiGe uniaxial strain generation on compliant insulating substrates. / Peterson, R. L.; Sturm, J. C.
Third International SiGe Technology and Device Meeting, ISTDM 2006 - Conference Digest. IEEE Computer Society, 2006. 1716047 (Third International SiGe Technology and Device Meeting, ISTDM 2006 - Conference Digest; Vol. 2006).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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AU - Peterson, R. L.

AU - Sturm, J. C.

PY - 2006

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M3 - Conference contribution

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SN - 1424404614

SN - 9781424404612

T3 - Third International SiGe Technology and Device Meeting, ISTDM 2006 - Conference Digest

BT - Third International SiGe Technology and Device Meeting, ISTDM 2006 - Conference Digest

PB - IEEE Computer Society

T2 - Third International SiGe Technology and Device Meeting, ISTDM 2006

Y2 - 15 May 2006 through 17 May 2006

ER -

Dynamics of uniform Si/SiGe uniaxial strain generation on compliant insulating substrates

Publication series

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All Science Journal Classification (ASJC) codes

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