Abstract
The scaling and dynamic modelling of nanostructure formation in the lithographically induced self-assembly (LISA) of thin polymer films was discussed. The period of the self-assembled pillars depended on the ratio between the surface tension and the electrostatic force. The pillars remained unaffected by the viscosity of the polymer.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 3200-3202 |
| Number of pages | 3 |
| Journal | Applied Physics Letters |
| Volume | 82 |
| Issue number | 19 |
| DOIs | |
| State | Published - May 12 2003 |
All Science Journal Classification (ASJC) codes
- Physics and Astronomy (miscellaneous)