Dynamic modeling and scaling of nanostructure formation in the lithographically induced self-assembly and self-construction

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Abstract

The scaling and dynamic modelling of nanostructure formation in the lithographically induced self-assembly (LISA) of thin polymer films was discussed. The period of the self-assembled pillars depended on the ratio between the surface tension and the electrostatic force. The pillars remained unaffected by the viscosity of the polymer.

Original languageEnglish (US)
Pages (from-to)3200-3202
Number of pages3
JournalApplied Physics Letters
Volume82
Issue number19
DOIs
StatePublished - May 12 2003

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)

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