Fingerprint
Dive into the research topics of 'Dynamic measurements of film thickness over local topography in spin coating'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Dynamic measurements of film thickness over local topography in spin coating
L. M. Manske, D. B. Graves, W. G. Oldham
Research output: Contribution to journal › Article › peer-review
20
Scopus
citations