Dynamic measurements of film thickness over local topography in spin coating

L. M. Manske; D. B. Graves; W. G. Oldham

doi:10.1063/1.102913

Dynamic measurements of film thickness over local topography in spin coating

L. M. Manske, D. B. Graves, W. G. Oldham

Research output: Contribution to journal › Article › peer-review

20 Scopus citations

Abstract

A technique is presented for making real-time, in situ measurements of film thickness profiles over local topography during spin coating. A laser is pulsed synchronously with the rotation of a spinning wafer to illuminate a microscope focused on a local feature being coated on the wafer. Interference fringes are captured photographically to allow observation of film thickness contours from initial spin-up to the final dried film. With this method we can observe the influcence of flow direction and microscopic feature shape and orientation on film profiles during the spinning and drying processes in spin coating.

Original language	English (US)
Pages (from-to)	2348-2350
Number of pages	3
Journal	Applied Physics Letters
Volume	56
Issue number	23
DOIs	https://doi.org/10.1063/1.102913
State	Published - 1990
Externally published	Yes

All Science Journal Classification (ASJC) codes

Physics and Astronomy (miscellaneous)

Access to Document

10.1063/1.102913

Cite this

@article{92850792393149e1a63fcc9e11911c6e,

title = "Dynamic measurements of film thickness over local topography in spin coating",

abstract = "A technique is presented for making real-time, in situ measurements of film thickness profiles over local topography during spin coating. A laser is pulsed synchronously with the rotation of a spinning wafer to illuminate a microscope focused on a local feature being coated on the wafer. Interference fringes are captured photographically to allow observation of film thickness contours from initial spin-up to the final dried film. With this method we can observe the influcence of flow direction and microscopic feature shape and orientation on film profiles during the spinning and drying processes in spin coating.",

author = "Manske, {L. M.} and Graves, {D. B.} and Oldham, {W. G.}",

year = "1990",

doi = "10.1063/1.102913",

language = "English (US)",

volume = "56",

pages = "2348--2350",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics Publising LLC",

number = "23",

}

TY - JOUR

T1 - Dynamic measurements of film thickness over local topography in spin coating

AU - Manske, L. M.

AU - Graves, D. B.

AU - Oldham, W. G.

PY - 1990

Y1 - 1990

N2 - A technique is presented for making real-time, in situ measurements of film thickness profiles over local topography during spin coating. A laser is pulsed synchronously with the rotation of a spinning wafer to illuminate a microscope focused on a local feature being coated on the wafer. Interference fringes are captured photographically to allow observation of film thickness contours from initial spin-up to the final dried film. With this method we can observe the influcence of flow direction and microscopic feature shape and orientation on film profiles during the spinning and drying processes in spin coating.

AB - A technique is presented for making real-time, in situ measurements of film thickness profiles over local topography during spin coating. A laser is pulsed synchronously with the rotation of a spinning wafer to illuminate a microscope focused on a local feature being coated on the wafer. Interference fringes are captured photographically to allow observation of film thickness contours from initial spin-up to the final dried film. With this method we can observe the influcence of flow direction and microscopic feature shape and orientation on film profiles during the spinning and drying processes in spin coating.

UR - http://www.scopus.com/inward/record.url?scp=1842521057&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=1842521057&partnerID=8YFLogxK

U2 - 10.1063/1.102913

DO - 10.1063/1.102913

M3 - Article

AN - SCOPUS:1842521057

SN - 0003-6951

VL - 56

SP - 2348

EP - 2350

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 23

ER -

Dynamic measurements of film thickness over local topography in spin coating

Abstract

All Science Journal Classification (ASJC) codes

Access to Document

Other files and links

Fingerprint

Cite this