Dual-beam focused ion beam: A multifunctional tool for nanotechnology

N. Yao; E. Kung; S. Allameh; W. O. Soboyejo

doi:10.1017/s1431927602101607

Dual-beam focused ion beam: A multifunctional tool for nanotechnology

N. Yao
, E. Kung
, S. Allameh
, W. O. Soboyejo

Princeton Materials Institute

Research output: Contribution to journal › Article › peer-review

Original language	English (US)
Pages (from-to)	56-57
Number of pages	2
Journal	Microscopy and Microanalysis
Volume	8
Issue number	SUPPL. 2
DOIs	https://doi.org/10.1017/s1431927602101607
State	Published - 2002

All Science Journal Classification (ASJC) codes

Instrumentation

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title = "Dual-beam focused ion beam: A multifunctional tool for nanotechnology",

author = "N. Yao and E. Kung and S. Allameh and Soboyejo, \{W. O.\}",

year = "2002",

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language = "English (US)",

volume = "8",

pages = "56--57",

journal = "Microscopy and Microanalysis",

issn = "1431-9276",

publisher = "Oxford University Press",

number = "SUPPL. 2",

}

TY - JOUR

T1 - Dual-beam focused ion beam

T2 - A multifunctional tool for nanotechnology

AU - Yao, N.

AU - Kung, E.

AU - Allameh, S.

AU - Soboyejo, W. O.

PY - 2002

Y1 - 2002

UR - https://www.scopus.com/pages/publications/0036425913

UR - https://www.scopus.com/pages/publications/0036425913#tab=citedBy

U2 - 10.1017/s1431927602101607

DO - 10.1017/s1431927602101607

M3 - Article

AN - SCOPUS:0036425913

SN - 1431-9276

VL - 8

SP - 56

EP - 57

JO - Microscopy and Microanalysis

JF - Microscopy and Microanalysis

IS - SUPPL. 2

ER -

Dual-beam focused ion beam: A multifunctional tool for nanotechnology

All Science Journal Classification (ASJC) codes

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