Dual-beam focused ion beam: A multifunctional tool for nanotechnology

N. Yao, E. Kung, S. Allameh, W. O. Soboyejo

Research output: Contribution to journalArticle

Original languageEnglish (US)
Pages (from-to)56-57
Number of pages2
JournalMicroscopy and Microanalysis
Volume8
Issue numberSUPPL. 2
DOIs
StatePublished - 2002

All Science Journal Classification (ASJC) codes

  • Instrumentation

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