Direct-write of sensor devices by a laser forward transfer technique

A. Piqué, D. W. Weir, P. K. Wu, B. Pratap, C. B. Arnold, B. R. Ringeisen, R. A. McGill, R. C.Y. Auyeung, R. A. Kant, D. B. Chrisey

Research output: Contribution to journalConference article

14 Scopus citations

Abstract

The use of direct-write techniques in the design and manufacture of sensor devices provides a flexible approach for next generation commercial and defense sensor applications. Using a laser forward transfer technique, we have demonstrated the ability to rapidly prototype temperature, biological and chemical sensor devices. This process, known as matrix assisted pulsed laser evaporation direct-write or MAPLE DW is compatible with a broad class of materials ranging from metals and electronic ceramics to chemoselective polymers and biomaterials. Various types of miniature sensor designs have been fabricated incorporating different materials such as metals, polymers, biomaterials or composites as multilayers or discrete structures on a single substrate. The MAPLE DW process is computer controlled which allows the sensor design to be easily modified and adapted to any specific application. To illustrate the potential of this technique, a functional chemical sensor system is demonstrated by fabricating all the passive and sensor components by MAPLE DW on a polyimide substrate. Additional devices fabricated by MAPLE DW including biosensors and temperature sensors and their performance are shown to illustrate the breadth of MAPLE DW and how this technique may influence current and future sensor applications.

Original languageEnglish (US)
Pages (from-to)361-368
Number of pages8
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume4637
DOIs
StatePublished - Jan 1 2002
Externally publishedYes
EventPhoton Processing in Microelectronics and Photonics - San Jose, CA, United States
Duration: Jan 21 2002Jan 24 2002

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Keywords

  • Biological Sensors
  • Chemical Sensors
  • Chemiresistor
  • Direct-Write of Sensor Materials
  • Laser Transfer
  • MAPLE Direct-Write
  • Temperature Sensors

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  • Cite this

    Piqué, A., Weir, D. W., Wu, P. K., Pratap, B., Arnold, C. B., Ringeisen, B. R., McGill, R. A., Auyeung, R. C. Y., Kant, R. A., & Chrisey, D. B. (2002). Direct-write of sensor devices by a laser forward transfer technique. Proceedings of SPIE - The International Society for Optical Engineering, 4637, 361-368. https://doi.org/10.1117/12.470642