Direct write microbatteries for next-generation microelectronic devices

Karen E. Swider-Lyons, Alberto Piqué, Craig B. Arnold, Ryan C. Wartena

Research output: Contribution to journalConference articlepeer-review

1 Scopus citations


Microbatteries and integrated microbattery systems are likely to be the sole power source or a power-source component for the next generation of microelectronic devices. As part of the LEAPS (Laser Engineering of Advanced Power Sources) program, custom-designed microbatteries and ultracapacitors will be integrated in microelectronic circuits for optimum performance. The Naval Research Laboratory's Matrix-Assisted Pulsed-Laser Deposition Direct-Write (MAPLE DW) process is used to rapidly fabricate various primary and secondary (non-rechargeable and chargeable) electrochemical power sources. This laser forward-transfer process can be used to transfer any type of battery material and battery material mixtures, including polymers, hydrated oxides, metals, and corrosive electrolytes. Additional laser micromachining capabilities are used to tailor the battery sizes, interfaces, and configurations. Examples are given for planar RuO2 ultracapacitors and stacked alkaline batteries.

Original languageEnglish (US)
Pages (from-to)265-273
Number of pages9
JournalMaterials Research Society Symposium - Proceedings
StatePublished - 2002
Externally publishedYes
EventElectronactive Polymers and Rapid Prototyping - Boston, MA, United States
Duration: Nov 26 2001Nov 30 2001

All Science Journal Classification (ASJC) codes

  • General Materials Science
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering


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