Direct formation of (CH3)2HSiCl from silicon and CH3Cl

Kimberly A. Magrini, John L. Falconer, Bruce E. Koel

Research output: Contribution to journalArticlepeer-review

9 Scopus citations


A Cu-catalyzed reaction procedure was found for the selective formation of dimethylchlorosilane [(CH3)2HSiCl] from the direct reaction of CH3Cl with solid Si. The new procedure is a two-step process. A Cu/Si sample is prepared by evaporating Cu onto clean polycrystalline Si under ultrahigh vacuum, and the Cu/Si surface is first activated by exposure to 10% HSiCl3/CH3Cl at 598 K. After the HSiCl3/CH3Cl mixture is evacuated from the reactor, the activated Cu/Si surface is reacted in fresh CH3Cl. For low surface concentrations of Cu, the partially hydrogenated silane, (CH3)2HSiCl, is selectively produced. Trichlorosilane was also found to activate polycrystalline Si (in the absence of Cu) for production of highly chlorinated methylchlorosilanes at a much higher rate than on the Cu/Si surface but with poor selectivity to (CH3)2HSiCl. All reactions are carried out at atmospheric pressure in a reactor that is attached to an ultrahigh-vacuum chamber. This allows surface analysis by Auger electron spectroscopy, which detected SiClx on reacted surfaces. These SiClx sites, which appear necessary for methylchlorosilane formation, are apparently formed during activation by HSiCl3.

Original languageEnglish (US)
Pages (from-to)5563-5568
Number of pages6
JournalJournal of physical chemistry
Issue number14
StatePublished - 1989
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • General Engineering
  • Physical and Theoretical Chemistry


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