Diffusion enhanced carbon loss from SiGeC layers due to oxidation

  • M. S. Carroll
  • , J. C. Sturm
  • , E. Napolitani
  • , D. De Salvador
  • , M. Berti
  • , J. Stangl
  • , G. Bauer
  • , D. J. Tweet

Research output: Contribution to journal › Article › peer-review

12 Scopus citations

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