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Diffusion and clustering of supersaturated carbon in SiGeC layers under oxidation

  • E. Napolitani
  • , D. De Salvador
  • , A. Coati
  • , M. Berti
  • , A. V. Drigo
  • , M. S. Carroll
  • , J. C. Sturm
  • , J. Stangl
  • , G. Bauer
  • , C. Spinella

Research output: Contribution to journal › Article › peer-review

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